Compensation of Scanner Creep and Hysteresis for AFM Nanomanipulation

Published 2008 View Full Article

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Title
Compensation of Scanner Creep and Hysteresis for AFM Nanomanipulation
Authors
Keywords
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Journal
IEEE Transactions on Automation Science and Engineering
Volume 5, Issue 2, Pages 197-206
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-04-10
DOI
10.1109/tase.2007.895008

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