Packageless AlN/ZnO/Si Structure for SAW Devices Applications

Published 2012 View Full Article

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Title
Packageless AlN/ZnO/Si Structure for SAW Devices Applications
Authors
Keywords
-
Journal
IEEE SENSORS JOURNAL
Volume 13, Issue 2, Pages 487-491
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-09-20
DOI
10.1109/jsen.2012.2219692

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