High Sensitivity, Miniature, Full 2-D Anemometer Based on MEMS Hot-Film Sensors

Title
High Sensitivity, Miniature, Full 2-D Anemometer Based on MEMS Hot-Film Sensors
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 13, Issue 5, Pages 1914-1920
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-12-22
DOI
10.1109/jsen.2012.2236014

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