Miniature Temperature Compensated Fabry-Perot Pressure Sensors Created with Self-aligned Polymer Photolithography Process

Published 2011 View Full Article

Authors

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Journal

IEEE SENSORS JOURNAL

Volume -, Issue -, Pages -

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2011-11-04

DOI

10.1109/jsen.2011.2174439

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IEEE SENSORS JOURNAL

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