Humidity Sensing of Ordered Macroporous Silicon With ${\rm HfO} _{2}$ Thin-Film Surface Coating

Published 2009 View Full Article

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Title
Humidity Sensing of Ordered Macroporous Silicon With ${\rm HfO} _{2}$ Thin-Film Surface Coating
Authors
Keywords
-
Journal
IEEE SENSORS JOURNAL
Volume 9, Issue 5, Pages 541-547
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-04-08
DOI
10.1109/jsen.2009.2016602

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