Article
Chemistry, Multidisciplinary
Wen Chen, Meixin Feng, Yongjun Tang, Jian Wang, Jianxun Liu, Qian Sun, Xumin Gao, Yongjin Wang, Hui Yang
Summary: GaN-on-Si resonant-cavity light-emitting diodes (RCLEDs) were successfully fabricated through wafer bonding and Si substrate removal. The double-sided dielectric distributed Bragg reflectors formed a high-quality optical resonant cavity, showing good spectral characteristics. High data transmission rates and low-cost emitters make them advantageous for future visible light communications.
Review
Chemistry, Analytical
Chi-Hsiang Hsieh, Che-Yuan Chang, Yi-Kai Hsiao, Chao-Chang A. Chen, Chang-Ching Tu, Hao-Chung Kuo
Summary: Chemical mechanical polishing (CMP) is a technology that can produce globally planarized surfaces without subsurface damage. A good CMP process for Silicon Carbide (SiC) requires a balanced interaction between surface oxidation and oxide layer removal. Improving oxidation efficiency and integrating hybrid energies are key to enhancing CMP efficiency.
Article
Chemistry, Multidisciplinary
Cheng-Jie Wang, Ying Ke, Guo-Yi Shiu, Yi-Yun Chen, Yung-Sen Lin, Hsiang Chen, Chia-Feng Lin
Summary: This study achieved directional emission properties and narrow linewidth in InGaN-based resonant-cavity light-emitting diodes through a simple wet etching process to transform the epitaxial structures into distributed Bragg reflector structures.
APPLIED SCIENCES-BASEL
(2021)
Review
Green & Sustainable Science & Technology
Hyunseop Lee, Hyoungjae Kim, Haedo Jeong
Summary: This study reviews the importance of CMP in semiconductor manufacturing, its impact on the environment, methods to reduce environmental burden, and the future direction of CMP technology for sustainability.
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY
(2022)
Article
Engineering, Electrical & Electronic
Wei Ou, Yang Mei, Daisuke Iida, Huan Xu, Minchao Xie, Yiwei Wang, Lei-Ying Ying, Bao-Ping Zhang, Kazuhiro Ohkawa
Summary: In this study, InGaN-based orange-red RCLEDs were successfully fabricated using a unique structure and technique, achieving low optical loss in the resonant cavity. The performance of the devices was validated through far-field emission observation and simulation, demonstrating the consistency between performance and design. This research is of significance for the development of displays and communication systems.
JOURNAL OF LIGHTWAVE TECHNOLOGY
(2022)
Article
Physics, Multidisciplinary
Zhao Shu-Yu, Xu Bin-Bin, Zhao Zhen-Yu, Lu Xue-Qin
Summary: In this study, two types of distributed Bragg reflectors (DBRs) were designed and evaporated on top of GaN-based resonant cavity light emitting diodes (RCLEDs). The reflectivity spectra of the DBRs were simulated and the performance differences between RCLED devices with different top mirrors were compared and analyzed. The results showed that the top mirror is an important part of RCLED and its reflection characteristics determine the optical performance of the device. The study also discussed the potential applications of RCLEDs with specially designed DBRs as top mirrors in optical communication and fiber sensing.
ACTA PHYSICA SINICA
(2022)
Article
Crystallography
Tsau-Hua Hsieh, Wei-Ta Huang, Kuo-Bin Hong, Tzu-Yi Lee, Yi-Hong Bai, Yi-Hua Pai, Chang-Ching Tu, Chun-Hui Huang, Yiming Li, Hao-Chung Kuo
Summary: We compared the performance of commercial mu-LEDs and three-layered staggered QW mu-LED arrays, and investigated the self-heating effect. We proposed a green mu-RCLED with staggered MQWs and Ta2O5/SiO2 DBRs. Simulation results showed that the staggered MQWs reduced blue-shift and maintained output power at high input current, while the Ta2O5/SiO2 DBRs significantly reduced FWHM and divergence angle. The mu-RCLEDs effectively resolved wavelength instability and color purity issues of conventional mu-LEDs.
Article
Chemistry, Multidisciplinary
Miaoxia Liu, Gerardo Salinas, Jing Yu, Antoine Cornet, Haidong Li, Alexander Kuhn, Neso Sojic
Summary: Multimodal imaging is a powerful approach that integrates multiple optical modalities in a single device, with potential applications in various fields. In this study, we developed wireless multimodal light-emitting chemical systems by coupling two light sources based on different physical principles. The results provide a novel alternative for designing autonomous hybrid systems with multimodal and multicolor optical readouts for complex bio-chemical systems.
Article
Engineering, Mechanical
Seungchul Hong, Deoksu Han, Keon-Soo Jang
Summary: The study focused on improving the planarization performance of dielectric layers by adjusting the zeta potential of particles and using surfactants, achieving a balance between performance and wafer defect density. High-quality wafer surfaces with rare defects, low roughness, and no contamination were achieved by tailoring the surface potential of colloidal silica nanoparticles and reducing defect concentration using fluorinated surfactant-induced intermolecular repulsion.
Article
Chemistry, Multidisciplinary
Niharika Gupta, Hyungjin Kim, Nima Sefidmooye Azar, Shiekh Zia Uddin, Der-Hsien Lien, Kenneth B. Crozier, Ali Javey
Summary: This research demonstrates bP-LEDs with high quantum efficiencies and wall-plug efficiencies. By integrating an Al2O3/Au optical cavity and an ITO conducting oxide layer, the emission efficiency and performance of the devices are significantly improved.
Article
Chemistry, Analytical
Hyunseop Lee
Summary: Efforts have been made to improve the efficiency of semiconductor manufacturing by reducing the environmental burden. Chemical mechanical polishing (CMP), used in semiconductor production, has been studied to increase material removal rate (MRR) while reducing environmental impact. This study analyzed the effect of voltage on the chemical solution and studied the tribological material removal characteristics in abrasive-free CMP. The results showed that electrolytic ionization increased the dissolved oxygen (DO) and MRR, while also increasing frictional force and temperature during CMP.
Article
Engineering, Mechanical
Hanqiang Wu, Liang Jiang, Xia Zhong, Jinwei Liu, Na Qin, Linmao Qian
Summary: The study showed that the material removal rate and surface roughness of GCr15 steel decrease as pH increases when polished using ethylenediamine and H2O2-based slurries, indicating that a more alkaline pH results in higher corrosion resistance and wear resistance for GCr15 steel.
Article
Optics
Langsheng Wang, Guoxuan Wang, Ke Yang, Weina Zhang, Wenjie Liu
Summary: In this paper, we propose an intensity-sensitive compact plasmonic sensor by integrating an annular aperture array with a resonant cavity LED (RCLED). The extraordinary optical transmission (EOT) peak originates from the mutual coupling between surface plasmon polariton (SPP) and Localized surface plasmon resonance (LSPR), which utilizes the EOT peak with narrower linewidth for intensity modulation. Simulation results show that by optimizing the resonant wavelength of the annular aperture array to match the emission wavelength of the RCLEDs, the relative intensity change reaches 97%, and the intensity sensitivity is 9744 %/RIU as a protein molecular layer covered on the sensor.
OPTICS COMMUNICATIONS
(2023)
Article
Engineering, Mechanical
Hyunseop Lee
Summary: In this article, a comparative study was conducted from a tribology perspective on CMP, mixed abrasive slurry CMP (MAS CMP), and PCMP. The experimental results demonstrated that SiC PCMP has higher friction and processing temperature than MAS CMP and general CMP, which may be caused by photocatalytic oxidation and the TiO2 particles used as photocatalysts.
Article
Engineering, Electrical & Electronic
Chengxin Wang, Tongqing Wang, Fangxin Tian, Xinchun Lu
Summary: A study on real-time and accurate measurement of copper film thickness was conducted to improve global planarization during chemical mechanical polishing. The advantages and disadvantages of amplitude and phase methods were compared, and the effects of liftoff distance and excitation signal frequency on measurement performance were analyzed. The experimental results showed that the double-coil eddy current thickness measurement system achieved better measurement performance.
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
(2022)
Article
Engineering, Electrical & Electronic
Tingting Chen, Ke Li, Huibing Mao, Ye Chen, Jiqing Wang, Guoen Weng
JOURNAL OF ELECTRONIC MATERIALS
(2019)
Article
Optics
Shiming Chen, Xiaobo Hu, Jiahua Tao, Juanjuan Xue, Guoen Weng, Jinchun Jiang, Xiuxu Shen, Shaoqiang Chen
Article
Thermodynamics
Xiaobo Hu, Tengfei Chen, Jianyu Hong, Shaoqiang Chen, Guoen Weng, Ziqiang Zhu, Junhao Chu
Article
Energy & Fuels
Jiahua Tao, Xiaobo Hu, Juanjuan Xue, Youyang Wang, Guoen Weng, Shaoqiang Chen, Ziqiang Zhu, Junhao Chu
SOLAR ENERGY MATERIALS AND SOLAR CELLS
(2019)
Article
Materials Science, Multidisciplinary
Xiaobo Hu, Jiahua Tao, Youyang Wang, Juanjuan Xue, Guoen Weng, Chuanjun Zhang, Shaoqiang Chen, Ziqiang Zhu, Junhao Chu
APPLIED MATERIALS TODAY
(2019)
Article
Physics, Multidisciplinary
Guoen Weng, Shaoqiang Chen, Yang Mei, Yuejun Liu, Hidefumi Akiyama, Xiaobo Hu, Jianping Liu, Baoping Zhang, Junhao Chu
ANNALEN DER PHYSIK
(2020)
Article
Physics, Multidisciplinary
Juanjuan Xue, Xiaobo Hu, Yixin Guo, Guoen Weng, Jinchun Jiang, Shaoqiang Chen, Ziqiang Zhu, Junhao Chu, Hidefumi Akiyama
FRONTIERS IN PHYSICS
(2019)
Article
Optics
Juanjuan Xue, Xiaobo Hu, YiXin Guo, Guoen Weng, Jinchun Jiang, Shaoqiang Chen, Ziqiang Zhu, Junhao Chu
Article
Optics
Youyang Wang, Junda Li, Yuanjing Chen, Jianhong Zhou, Jiayan Zhang, Wangchen Mao, Shiqi Zheng, Yuhan Pan, Yiqi Liu, Kaijie Dai, Xiaobo Hu, Jiahua Tao, Guo-En Weng, Jinchun Jiang, Shaoqiang Chen, Junhao Chu
Article
Energy & Fuels
Jianyu Hong, Youyang Wang, Yuanjing Chen, Xiaobo Hu, Guoen Weng, Shaoqiang Chen, Hidefumi Akiyama, Yingbin Zhang, Bo Zhang, Junhao Chu
PROGRESS IN PHOTOVOLTAICS
(2020)
Article
Optics
Guoen Weng, Yuejun Liu, Shaoqiang Chen, Takashi Ito, Xiaobo Hu, Chunhu Zhao, Jianping Liu, Junhao Chu, Hidefumi Akiyama
Article
Engineering, Environmental
Hanbing Zhang, Chunhu Zhao, Shengjie Chen, Jiao Tian, Jiyu Yan, Guoen Weng, Xiaobo Hu, Jiahua Tao, Yanlin Pan, Shaoqiang Chen, Hidefumi Akiyama, Junhao Chu
CHEMICAL ENGINEERING JOURNAL
(2020)
Article
Computer Science, Information Systems
Xiaobo Hu, Youyang Wang, Yun Jia, Jianyu Hong, Tengfei Chen, Juanjuan Xue, Yuanjing Chen, Jiahua Tao, Guoen Weng, Shaoqiang Chen, Ziqiang Zhu, Junhao Chu
Article
Chemistry, Multidisciplinary
Guoen Weng, Jiao Tian, Shiming Chen, Juanjuan Xue, Jiyu Yan, Xiaobo Hu, Shaoqiang Chen, Ziqiang Zhu, Junhao Chu
Article
Nanoscience & Nanotechnology
Jiao Tian, Guoen Weng, Youyang Wang, Xiaobo Hu, Shaoqiang Chen, Junhao Chu
ACS APPLIED NANO MATERIALS
(2019)