Anode Shape Prediction in Through-Mask-Ecmm using Fem

Published 2015 View Full Article

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Title
Anode Shape Prediction in Through-Mask-Ecmm using Fem
Authors
Keywords
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Journal
MACHINING SCIENCE AND TECHNOLOGY
Volume 19, Issue 2, Pages 286-312
Publisher
Informa UK Limited
Online
2015-05-07
DOI
10.1080/10910344.2015.1018533
References
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