Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser

Published 2014 View Full Article

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Title
Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser
Authors
Keywords
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Journal
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
Volume 20, Issue 5, Pages 29-35
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-02-01
DOI
10.1109/jstqe.2013.2295352

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