Recent Advances Using Guanidinate Ligands for Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) Applications
出版年份 2014 全文链接
标题
Recent Advances Using Guanidinate Ligands for Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) Applications
作者
关键词
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出版物
AUSTRALIAN JOURNAL OF CHEMISTRY
Volume 67, Issue 7, Pages 989
出版商
CSIRO Publishing
发表日期
2014-06-16
DOI
10.1071/ch14172
参考文献
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