Downscaling of defect-passivated Gd2O3thin films on p-Si(0 0 1) wafers grown by H2O-assisted atomic layer deposition

标题
Downscaling of defect-passivated Gd2O3thin films on p-Si(0 0 1) wafers grown by H2O-assisted atomic layer deposition
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 25, Issue 10, Pages 105001
出版商
IOP Publishing
发表日期
2010-09-10
DOI
10.1088/0268-1242/25/10/105001

向作者/读者发起求助以获取更多资源

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now