Atomic layer deposition of Al-incorporated Zn(O,S) thin films with tunable electrical properties
出版年份 2014 全文链接
标题
Atomic layer deposition of Al-incorporated Zn(O,S) thin films with tunable
electrical properties
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 105, Issue 20, Pages 202101
出版商
AIP Publishing
发表日期
2014-11-18
DOI
10.1063/1.4901899
参考文献
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