Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition

标题
Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 1, Pages 01A135
出版商
American Vacuum Society
发表日期
2011-12-10
DOI
10.1116/1.3664758

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