Optimization of graphene dry etching conditions via combined microscopic and spectroscopic analysis
出版年份 2013 全文链接
标题
Optimization of graphene dry etching conditions via combined microscopic and spectroscopic analysis
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 19, Pages 193111
出版商
AIP Publishing
发表日期
2013-05-18
DOI
10.1063/1.4807425
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