Effective passivation of Si surfaces by plasma deposited SiOx/a-SiNx:H stacks

标题
Effective passivation of Si surfaces by plasma deposited SiOx/a-SiNx:H stacks
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 98, Issue 22, Pages 222102
出版商
AIP Publishing
发表日期
2011-06-05
DOI
10.1063/1.3595940

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