The coupling effect of slow-rate mechanical motion on the confined etching process in electrochemical mechanical micromachining
出版年份 2018 全文链接
标题
The coupling effect of slow-rate mechanical motion on the confined etching process in electrochemical mechanical micromachining
作者
关键词
confined etchant layer technique, electrochemical micromachining, coupling effect, mechanical motion, confined etching
出版物
Science China-Chemistry
Volume 61, Issue 6, Pages 715-724
出版商
Springer Nature
发表日期
2018-04-20
DOI
10.1007/s11426-017-9195-3
参考文献
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