Processing outcomes of the AFM probe-based machining approach with different feed directions

标题
Processing outcomes of the AFM probe-based machining approach with different feed directions
作者
关键词
Atomic force microscopy, Tip-based machining, Feed direction, Three-sided pyramidal probe, Chip formation, Machined depth
出版商
Elsevier BV
发表日期
2016-05-25
DOI
10.1016/j.precisioneng.2016.05.009

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