Atmospheric plasmas for thin film deposition: A critical review

标题
Atmospheric plasmas for thin film deposition: A critical review
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 520, Issue 13, Pages 4219-4236
出版商
Elsevier BV
发表日期
2012-01-29
DOI
10.1016/j.tsf.2012.01.026

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation