Room-temperature tilted-target sputtering deposition of highly transparent and low sheet resistance Al doped ZnO electrodes

标题
Room-temperature tilted-target sputtering deposition of highly transparent and low sheet resistance Al doped ZnO electrodes
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 3, Issue 20, Pages 5322-5331
出版商
Royal Society of Chemistry (RSC)
发表日期
2015-05-05
DOI
10.1039/c5tc00695c

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