Study on material removal for nanochannels fabrication using atomic force microscopy tip-based nanomilling approach
出版年份 2017 全文链接
标题
Study on material removal for nanochannels fabrication using atomic force microscopy tip-based nanomilling approach
作者
关键词
-
出版物
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE
Volume -, Issue -, Pages 095440541774818
出版商
SAGE Publications
发表日期
2017-12-24
DOI
10.1177/0954405417748188
参考文献
相关参考文献
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