High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope

标题
High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 23, Issue 8, Pages 085303
出版商
IOP Publishing
发表日期
2012-02-01
DOI
10.1088/0957-4484/23/8/085303

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