Microwave Plasma-Activated Chemical Vapor Deposition of Nitrogen-Doped Diamond. II: CH4/N2/H2 Plasmas

标题
Microwave Plasma-Activated Chemical Vapor Deposition of Nitrogen-Doped Diamond. II: CH4/N2/H2 Plasmas
作者
关键词
-
出版物
JOURNAL OF PHYSICAL CHEMISTRY A
Volume 120, Issue 43, Pages 8537-8549
出版商
American Chemical Society (ACS)
发表日期
2016-10-09
DOI
10.1021/acs.jpca.6b09009

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