The influence of anatase titanium dioxide film (0 0 1) preferred orientation on N implantation process

标题
The influence of anatase titanium dioxide film (0 0 1) preferred orientation on N implantation process
作者
关键词
N doped TiO, 2, Ion beam technology, Texture, XPS
出版物
MATERIALS LETTERS
Volume 197, Issue -, Pages 28-30
出版商
Elsevier BV
发表日期
2017-03-28
DOI
10.1016/j.matlet.2017.03.149

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