Structural and electrical characteristics of high quality (100) orientated-Zn3N2 thin films grown by radio-frequency magnetron sputtering

标题
Structural and electrical characteristics of high quality (100) orientated-Zn3N2 thin films grown by radio-frequency magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 8, Pages 083710
出版商
AIP Publishing
发表日期
2010-10-22
DOI
10.1063/1.3493208

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