Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review
出版年份 2014 全文链接
标题
Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review
作者
关键词
Pressure Sensor, Etch Rate, Polysilicon, Wheatstone Bridge, Doping Profile
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 20, Issue 7, Pages 1213-1247
出版商
Springer Nature
发表日期
2014-05-23
DOI
10.1007/s00542-014-2215-7
参考文献
相关参考文献
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