Synthesis and characterization of helium-charged titanium hydride films deposited by direct current magnetron sputtering with mixed gas

出版年份 2017 全文链接

标题

作者

关键词

Magnetron sputtering, Titanium hydride, Helium hydrogen incorporation

出版物

Volume 119, Issue -, Pages 180-187

出版商

Elsevier BV

发表日期

2017-01-17

DOI

10.1016/j.matdes.2017.01.044

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