Surface acoustic wave temperature sensor based on Pt/AlN/4 H-SiC structure for high-temperature environments

Investigation of Temperature Sensing Capabilities of GaN/SiC and GaN/Sapphire Surface Acoustic Wave Devices

(2021) George Boldeiu et al.   IEEE Access

FEM Modeling of the Temperature Influence on the Performance of SAW Sensors Operating at GigaHertz Frequency Range and at High Temperature Up to 500 °C

(2020) Jean Claude Asseko Ondo et al.   SENSORS

AlN/GaN/Sapphire heterostructure for high-temperature packageless acoustic wave devices

(2018) F. Bartoli et al.   SENSORS AND ACTUATORS A-PHYSICAL

Sezawa Propagation Mode in GaN on Si Surface Acoustic Wave Type Temperature Sensor Structures Operating at GHz Frequencies

(2015) Alexandru Muller et al.   IEEE ELECTRON DEVICE LETTERS

In situ high-temperature characterization of AlN-based surface acoustic wave devices

(2013) Thierry Aubert et al.   JOURNAL OF APPLIED PHYSICS

AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

(2012) Chih-Ming Lin et al.   ADVANCED MATERIALS

Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films

(2008) Cinzia Caliendo   APPLIED PHYSICS LETTERS