In situ high-temperature characterization of AlN-based surface acoustic wave devices

Iridium interdigital transducers for high-temperature surface acoustic wave applications

(2012) Thierry Aubert et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Investigations on AlN/sapphire piezoelectric bilayer structure for high-temperature SAW applications

(2012) Thierry Aubert et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Behavior of platinum/tantalum as interdigital transducers for SAW devices in high-temperature environments

(2011) Thierry Aubert et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications

(2011) T. Aubert et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications

(2010) Chih-Ming Lin et al.   APPLIED PHYSICS LETTERS

Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications

(2010) Thierry Aubert et al.   APPLIED PHYSICS LETTERS

Stability of thin platinum films implemented in high-temperature microdevices

(2009) R.M. Tiggelaar et al.   SENSORS AND ACTUATORS A-PHYSICAL

Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films

(2008) Cinzia Caliendo   APPLIED PHYSICS LETTERS