Investigation on the machinability of copper-coated monocrystalline silicon by applying elliptical vibration diamond cutting
出版年份 2023 全文链接
标题
Investigation on the machinability of copper-coated monocrystalline silicon by applying elliptical vibration diamond cutting
作者
关键词
-
出版物
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 82, Issue -, Pages 25-32
出版商
Elsevier BV
发表日期
2023-03-04
DOI
10.1016/j.precisioneng.2023.03.002
参考文献
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