Understanding ion and atom fluxes during high-power impulse magnetron sputtering deposition of NbCx films from a compound target
出版年份 2023 全文链接
标题
Understanding ion and atom fluxes during high-power impulse magnetron sputtering deposition of NbCx films from a compound target
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 41, Issue 6, Pages -
出版商
American Vacuum Society
发表日期
2023-10-27
DOI
10.1116/6.0002944
参考文献
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