Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors: Implications for Nanoelectronic Gates, Interconnects, and Spintronics
出版年份 2022 全文链接
标题
Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors: Implications for Nanoelectronic Gates, Interconnects, and Spintronics
作者
关键词
-
出版物
ACS Applied Nano Materials
Volume 5, Issue 10, Pages 14759-14770
出版商
American Chemical Society (ACS)
发表日期
2022-09-21
DOI
10.1021/acsanm.2c03074
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