Challenges of Wafer‐Scale Integration of 2D Semiconductors for High‐Performance Transistor Circuits

Halide chemical vapor deposition of 2D semiconducting atomically-thin crystals: From self-seeded to epitaxial growth

(2022) Avinash Patsha et al.   Applied Materials Today

Ultralow contact resistance between semimetal and monolayer semiconductors

(2021) Pin-Chun Shen et al.   NATURE

Epitaxial growth of wafer-scale molybdenum disulfide semiconductor single crystals on sapphire

(2021) Taotao Li et al.   Nature Nanotechnology

Identification of two-dimensional layered dielectrics from first principles

(2021) Mehrdad Rostami Osanloo et al.   Nature Communications

Electronic Structure and Stacking Arrangement of Tungsten Disulfide at the Gold Contact

(2021) Cherrelle J. Thomas et al.   ACS Nano

Advancing Monolayer 2-D nMOS and pMOS Transistor Integration From Growth to Van Der Waals Interface Engineering for Ultimate CMOS Scaling

(2021) Chelsey Dorow et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Wafer-scale functional circuits based on two dimensional semiconductors with fabrication optimized by machine learning

(2021) Xinyu Chen et al.   Nature Communications

Transistors based on two-dimensional materials for future integrated circuits

(2021) Saptarshi Das et al.   Nature Electronics

A FinFET with one atomic layer channel

(2020) Mao-Lin Chen et al.   Nature Communications

Atomic layer deposition of a uniform thin film on two-dimensional transition metal dichalcogenides

(2020) Taewook Nam et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Insulators for 2D nanoelectronics: the gap to bridge

(2020) Yury Yu. Illarionov et al.   Nature Communications

High-efficiency synthesis of large-area monolayer WS2 crystals on SiO2/Si substrate via NaCl-assisted atmospheric pressure chemical vapor deposition

(2020) Biao Shi et al.   APPLIED SURFACE SCIENCE

Van der Waals contacts between three-dimensional metals and two-dimensional semiconductors

(2019) Yan Wang et al.   NATURE

Universal Fermi-Level Pinning in Transition-Metal Dichalcogenides

(2019) Kai Sotthewes et al.   Journal of Physical Chemistry C

Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature

(2019) B. Groven et al.   JOURNAL OF CHEMICAL PHYSICS

CVD growth of monolayer WS2 through controlled seed formation and vapor density

(2019) Büşra Yorulmaz et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Boosting and Balancing Electron and Hole Mobility in Single- and Bilayer WSe2 Devices via Tailored Molecular Functionalization

(2019) Marc-Antoine Stoeckel et al.   ACS Nano

Graphene and two-dimensional materials for silicon technology

(2019) Deji Akinwande et al.   NATURE

Nucleation engineering for atomic layer deposition of uniform sub-10 nm high-K dielectrics on MoTe2

(2019) Yu-Shu Lin et al.   APPLIED SURFACE SCIENCE

Controllable synthesis of millimeter-size single crystal WS2

(2019) Feifei Lan et al.   APPLIED SURFACE SCIENCE

Realizing Large-Scale, Electronic-Grade Two-Dimensional Semiconductors

(2018) Yu-Chuan Lin et al.   ACS Nano

Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: an Insight in the Nucleation Mechanism

(2018) Benjamin Groven et al.   CHEMISTRY OF MATERIALS

From the metal to the channel: a study of carrier injection through the metal/2D MoS2 interface

(2017) Goutham Arutchelvan et al.   Nanoscale

Atomic Layer Deposition of Al2O3 on WSe2 Functionalized by Titanyl Phthalocyanine

(2016) Jun Hong Park et al.   ACS Nano

Monolithic 3D CMOS Using Layered Semiconductors

(2016) Angada B. Sachid et al.   ADVANCED MATERIALS

Low-Resistance 2D/2D Ohmic Contacts: A Universal Approach to High-Performance WSe2, MoS2, and MoSe2 Transistors

(2016) Hsun-Jen Chuang et al.   NANO LETTERS

Impact of Contact on the Operation and Performance of Back-Gated Monolayer MoS2 Field-Effect-Transistors

(2015) Wei Liu et al.   ACS Nano

High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity

(2015) Kibum Kang et al.   NATURE

High-Gain Inverters Based on WSe2 Complementary Field-Effect Transistors

(2014) Mahmut Tosun et al.   ACS Nano

MoS2 P-type Transistors and Diodes Enabled by High Work Function MoOx Contacts

(2014) Steven Chuang et al.   NANO LETTERS

Chloride Molecular Doping Technique on 2D Materials: WS2 and MoS2

(2014) Lingming Yang et al.   NANO LETTERS

Controlling sulphur precursor addition for large single crystal domains of WS2

(2014) Youmin Rong et al.   Nanoscale

Designing Electrical Contacts toMoS2Monolayers: A Computational Study

(2012) Igor Popov et al.   PHYSICAL REVIEW LETTERS