Remote Oxygen Scavenging of the Interfacial Oxide Layer in Ferroelectric Hafnium–Zirconium Oxide-Based Metal–Oxide–Semiconductor Structures
出版年份 2022 全文链接
标题
Remote Oxygen Scavenging of the Interfacial Oxide Layer in Ferroelectric Hafnium–Zirconium Oxide-Based Metal–Oxide–Semiconductor Structures
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 14, Issue 38, Pages 43897-43906
出版商
American Chemical Society (ACS)
发表日期
2022-09-19
DOI
10.1021/acsami.2c11736
参考文献
相关参考文献
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