Oxygen‐Scavenging Effects of Added Ti Layer in the TiN Gate of Metal‐Ferroelectric‐Insulator‐Semiconductor Capacitor with Al‐Doped HfO 2 Ferroelectric Film
出版年份 2022 全文链接
标题
Oxygen‐Scavenging Effects of Added Ti Layer in the TiN Gate of Metal‐Ferroelectric‐Insulator‐Semiconductor Capacitor with Al‐Doped HfO
2
Ferroelectric Film
作者
关键词
-
出版物
Advanced Electronic Materials
Volume -, Issue -, Pages 2200310
出版商
Wiley
发表日期
2022-06-23
DOI
10.1002/aelm.202200310
参考文献
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