Oxygen‐Scavenging Effects of Added Ti Layer in the TiN Gate of Metal‐Ferroelectric‐Insulator‐Semiconductor Capacitor with Al‐Doped HfO 2 Ferroelectric Film

标题
Oxygen‐Scavenging Effects of Added Ti Layer in the TiN Gate of Metal‐Ferroelectric‐Insulator‐Semiconductor Capacitor with Al‐Doped HfO 2 Ferroelectric Film
作者
关键词
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出版物
Advanced Electronic Materials
Volume -, Issue -, Pages 2200310
出版商
Wiley
发表日期
2022-06-23
DOI
10.1002/aelm.202200310

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