标题
Detailed study of reactively sputtered ScN thin films at room temperature
作者
关键词
Scadium nitride, Soft x-ray absorption spectroscopy, X-ray absorption fine structure, Uv visible spectroscopy, Nanoindentation
出版物
Materialia
Volume 22, Issue -, Pages 101375
出版商
Elsevier BV
发表日期
2022-02-26
DOI
10.1016/j.mtla.2022.101375
参考文献
相关参考文献
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