Soft Graphoepitaxy for Large Area Directed Self-Assembly of Polystyrene-block-Poly(dimethylsiloxane) Block Copolymer on Nanopatterned POSS Substrates Fabricated by Nanoimprint Lithography

标题
Soft Graphoepitaxy for Large Area Directed Self-Assembly of Polystyrene-block-Poly(dimethylsiloxane) Block Copolymer on Nanopatterned POSS Substrates Fabricated by Nanoimprint Lithography
作者
关键词
-
出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 25, Issue 22, Pages 3425-3432
出版商
Wiley
发表日期
2015-04-27
DOI
10.1002/adfm.201500100

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