Optimisation of amorphous zinc tin oxide thin film transistors by remote-plasma reactive sputtering
出版年份 2016 全文链接
标题
Optimisation of amorphous zinc tin oxide thin film transistors by remote-plasma reactive sputtering
作者
关键词
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出版物
JOURNAL OF APPLIED PHYSICS
Volume 120, Issue 8, Pages 085312
出版商
AIP Publishing
发表日期
2016-08-30
DOI
10.1063/1.4961608
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