Low temperature remote plasma sputtering of indium tin oxide for flexible display applications

标题
Low temperature remote plasma sputtering of indium tin oxide for flexible display applications
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 518, Issue 4, Pages 1355-1358
出版商
Elsevier BV
发表日期
2009-05-14
DOI
10.1016/j.tsf.2009.04.072

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