Fabrication of FeSi and Fe3Si compounds by electron beam induced mixing of [Fe/Si]2 and [Fe3/Si]2 multilayers grown by focused electron beam induced deposition

标题
Fabrication of FeSi and Fe3Si compounds by electron beam induced mixing of [Fe/Si]2 and [Fe3/Si]2 multilayers grown by focused electron beam induced deposition
作者
关键词
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出版物
JOURNAL OF APPLIED PHYSICS
Volume 119, Issue 23, Pages 234306
出版商
AIP Publishing
发表日期
2016-06-22
DOI
10.1063/1.4954067

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