Activation energy of gold-induced crystallization of amorphous silicon suboxide films

标题
Activation energy of gold-induced crystallization of amorphous silicon suboxide films
作者
关键词
Thin films, Silicon suboxide, Gold-induced crystallization, Polycrystalline silicon, Activation energy
出版物
MATERIALS LETTERS
Volume -, Issue -, Pages 132566
出版商
Elsevier BV
发表日期
2022-06-02
DOI
10.1016/j.matlet.2022.132566

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