A mass sensor based on 3-DOF mode localized coupled resonator under atmospheric pressure

出版年份 2018 全文链接

标题

作者

关键词

MEMS resonant sensors, 3-DOF coupled resonator, Mode localization, Mass sensing, Reversibility, Magnetic nanoparticles

出版物

Volume 279, Issue -, Pages 254-262

出版商

Elsevier BV

发表日期

2018-06-19

DOI

10.1016/j.sna.2018.06.028

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