Scalable Submicron Channel Fabrication by Suspended Nanofiber Lithography for Short‐Channel Field‐Effect Transistors
出版年份 2021 全文链接
标题
Scalable Submicron Channel Fabrication by Suspended Nanofiber Lithography for Short‐Channel Field‐Effect Transistors
作者
关键词
-
出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 32, Issue 6, Pages 2109254
出版商
Wiley
发表日期
2021-10-21
DOI
10.1002/adfm.202109254
参考文献
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