Experimental investigations on the laser-assisted machining of single crystal Si for optimal machining

标题
Experimental investigations on the laser-assisted machining of single crystal Si for optimal machining
作者
关键词
Laser-assisted machining, Single crystal Si, Surface roughness, Taguchi method, Response surface methodology
出版物
OPTICS AND LASER TECHNOLOGY
Volume 141, Issue -, Pages 107113
出版商
Elsevier BV
发表日期
2021-04-12
DOI
10.1016/j.optlastec.2021.107113

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