Experimental study on water jet guided laser micro-machining of mono-crystalline silicon

标题
Experimental study on water jet guided laser micro-machining of mono-crystalline silicon
作者
关键词
Water jet guided laser, Micro-machining, Surface topography, Aspect ratio
出版物
OPTICS AND LASER TECHNOLOGY
Volume 140, Issue -, Pages 107057
出版商
Elsevier BV
发表日期
2021-03-27
DOI
10.1016/j.optlastec.2021.107057

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