Correlation between the macroscopic ferroelectric material properties of Si:HfO2and the statistics of 28 nm FeFET memory arrays

标题
Correlation between the macroscopic ferroelectric material properties of Si:HfO2and the statistics of 28 nm FeFET memory arrays
作者
关键词
-
出版物
FERROELECTRICS
Volume 497, Issue 1, Pages 42-51
出版商
Informa UK Limited
发表日期
2016-05-06
DOI
10.1080/00150193.2016.1162021

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