An analytical model to predict the depth of sub-surface damage for grinding of brittle materials

标题
An analytical model to predict the depth of sub-surface damage for grinding of brittle materials
作者
关键词
Silicon, Analytical model, Sub-surface damage, Dislocation, Fracture mechanics
出版物
出版商
Elsevier BV
发表日期
2021-05-15
DOI
10.1016/j.cirpj.2021.03.019

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