High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
出版年份 2021 全文链接
标题
High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
作者
关键词
-
出版物
Nature Communications
Volume 12, Issue 1, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2021-04-16
DOI
10.1038/s41467-021-21973-z
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