Influence of annealing temperature on structural, optical and electrical properties of AZO/Pd/AZO films

标题
Influence of annealing temperature on structural, optical and electrical properties of AZO/Pd/AZO films
作者
关键词
AZO/Pd/AZO multilayer film, Magnetron sputtering, Hydrogen introduction, Sheet resistance, Transmittance
出版物
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 153, Issue -, Pages 52-60
出版商
Elsevier BV
发表日期
2016-04-30
DOI
10.1016/j.solmat.2016.04.015

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