Impact of area scaling on the ferroelectric properties of back-end of line compatible Hf0.5Zr0.5O2 and Si:HfO2-based MFM capacitors
出版年份 2021 全文链接
标题
Impact of area scaling on the ferroelectric properties of back-end of line compatible Hf0.5Zr0.5O2 and Si:HfO2-based MFM capacitors
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 118, Issue 6, Pages 062904
出版商
AIP Publishing
发表日期
2021-02-12
DOI
10.1063/5.0035650
参考文献
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