Origin of the retention loss in ferroelectric Hf0.5Zr0.5O2-based memory devices

标题
Origin of the retention loss in ferroelectric Hf0.5Zr0.5O2-based memory devices
作者
关键词
Ferroelectric hafnium oxide, Defects, Oxygen vacancies, Ferroelectric aging, Ferroelectric memory
出版物
ACTA MATERIALIA
Volume 204, Issue -, Pages 116515
出版商
Elsevier BV
发表日期
2020-11-30
DOI
10.1016/j.actamat.2020.116515

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