Effect of abrasive size on nano abrasive machining for wurtzite GaN single crystal via molecular dynamics study
出版年份 2020 全文链接
标题
Effect of abrasive size on nano abrasive machining for wurtzite GaN single crystal via molecular dynamics study
作者
关键词
GaN single Crystal, Nano abrasive machining, Abrasive size, Molecular dynamics
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 121, Issue -, Pages 105439
出版商
Elsevier BV
发表日期
2020-09-18
DOI
10.1016/j.mssp.2020.105439
参考文献
相关参考文献
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